Nano Zirconia Powder — High-Purity Sub-100nm ZrO₂ for Electronics, Energy & Catalysis
SEMITECH Nano Zirconia (≥99.9% ZrO₂, d50 30–80 nm, BET 15–40 m²/g) is produced by hydrothermal synthesis with narrow size distribution (GSD <1.5) and tunable crystal phase. Available as dry powder and aqueous dispersion for MLCC, CMP, solid-state batteries, and catalyst supports.
Technical Specifications
| Parameter | Unit | Typical Value | Test Method |
|---|---|---|---|
| ZrO₂ purity (metals basis) | % | ≥99.9 | ICP-OES |
| HfO₂ | wt% | ≤1.5 | ICP-OES |
| SiO₂ | ppm | ≤100 | ICP-OES |
| Fe₂O₃ | ppm | ≤50 | ICP-OES |
| Na₂O | ppm | ≤200 | ICP-OES |
| Cl⁻ | ppm | ≤300 | Ion chromatography |
| Median particle size d50 | nm | 30–80 | Dynamic light scattering (ISO 22412) |
| Particle size d90 | nm | ≤150 | Dynamic light scattering |
| BET specific surface area | m²/g | 15–40 | N₂ adsorption (ISO 9277) |
| Crystal phase (as-synthesized) | — | Monoclinic or tetragonal | XRD (Rietveld) |
| Loss on ignition (600°C) | wt% | ≤3.0 | Gravimetric |
| Tap density | g/cm³ | 0.8–1.2 | ASTM B527 |
| Appearance | — | White powder | Visual |
Aqueous Dispersion Grade
| Parameter | Unit | Typical Value |
|---|---|---|
| Solids content | wt% | 20–40 (adjustable) |
| pH | — | 3.0–4.5 |
| Viscosity (25°C) | mPa·s | ≤50 (at 20 wt%) |
| Zeta potential | mV | +30 to +50 |
| Shelf stability | — | ≥6 months (no sedimentation) |
Application Suggestions
MLCC Internal Electrode Co-Firing
Added at 0.5–3 wt% to BaTiO₃ dielectrics, nano ZrO₂ pins grain boundaries during co-firing at 1150–1300°C. Low-Na₂O, low-Cl⁻ specs meet Class II MLCC purity requirements.
CMP Slurry for Semiconductor Wafer Polishing
Aqueous dispersion (d50 40–60 nm) delivers higher removal rates than colloidal silica on SiC, GaN, and sapphire substrates with Ra <0.3 nm. Monoclinic phase preferred for CMP hardness.
Solid-State Battery Electrolyte Layers
Sub-50 nm particles enable dense LLZO film sintering at 1050–1150°C (vs. 1230°C for micron-scale), preserving lithium stoichiometry.
Catalyst Support and Promoter
BET 25–40 m²/g supports methanol synthesis, water-gas shift, and Fischer-Tropsch reactions. Ce-doped variants (5–20 mol% CeO₂) available for automotive TWC applications.
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Technical Support & FAQ: Nano Zirconia Powder
+Q1: What crystal phase should I specify?
Monoclinic for CMP, abrasive, and refractory (higher hardness). Tetragonal for catalyst supports, SOFC, and LLZO precursors (oxygen storage, better sinterability).
+Q2: Can the dispersion be reformulated into organic solvents?
Yes. Surface modification with silane coupling agents enables transfer into ethanol, toluene, MEK, or NMP. Pre-functionalized dispersions available at MOQ 50 kg, 4–6 weeks.
+Q3: What purity level is needed for electronic-grade applications?
Total metallic impurities <500 ppm, Na₂O <200 ppm, Fe₂O₃ <50 ppm. Ultra-high-purity grade (<100 ppm total) available at MOQ 25 kg.
+Q4: What are pricing, MOQ, and lead times?
Dry powder: MOQ 5 kg, 7–14 days. Dispersion: MOQ 25 kg, 10–21 days. Free 200 g samples with full CoA. Contact info@semitechnm.com.
Packing & Storage Information
Dry powder: 1 kg vacuum-sealed bags, 5 kg PE bags, or 25 kg fiber drums under N₂. Dispersion: 5–25–200 kg HDPE containers; do not freeze. Store dry powder at <30°C, <50% RH (12-month shelf life). Dispersion at 5–35°C (6-month shelf life).