Nano Zirconia Powder — High-Purity Sub-100nm ZrO₂ for Electronics, Energy & Catalysis
SEMITECH Nano Zirconia is a high-purity (≥99.9% ZrO₂ basis) sub-100 nm zirconia powder produced by hydrothermal synthesis, delivering tightly controlled particle-size distribution (d50 30–80 nm), high specific surface area (BET 15–40 m²/g), and tunable crystal phase (monoclinic, tetragonal, or mixed) for applications in MLCC ceramics, CMP slurry formulation, solid-state battery electrolytes, and heterogeneous catalyst supports.
Unlike conventional precipitated or plasma-synthesized zirconia, SEMITECH's hydrothermal route produces primary particles with narrow size distribution (GSD <1.5), well-developed crystallinity without post-calcination agglomeration, and surface chemistry amenable to organic functionalization — critical advantages for colloidal processing in electronic ceramic and semiconductor applications.
Technical Specifications
| Parameter | Unit | Typical Value | Test Method |
|---|---|---|---|
| ZrO₂ purity (metals basis) | % | ≥99.9 | ICP-OES |
| HfO₂ | wt% | ≤1.5 | ICP-OES |
| SiO₂ | ppm | ≤100 | ICP-OES |
| Fe₂O₃ | ppm | ≤50 | ICP-OES |
| Na₂O | ppm | ≤200 | ICP-OES |
| Cl⁻ | ppm | ≤300 | Ion chromatography |
| Median particle size d50 | nm | 30–80 | Dynamic light scattering (ISO 22412) |
| Particle size d90 | nm | ≤150 | Dynamic light scattering |
| BET specific surface area | m²/g | 15–40 | N₂ adsorption (ISO 9277) |
| Crystal phase (as-synthesized) | — | Monoclinic or tetragonal | XRD (Rietveld) |
| Loss on ignition (600°C) | wt% | ≤3.0 | Gravimetric |
| Tap density | g/cm³ | 0.8–1.2 | ASTM B527 |
| Appearance | — | White powder | Visual |
Aqueous Dispersion Grade
| Parameter | Unit | Typical Value |
|---|---|---|
| Solids content | wt% | 20–40 (adjustable) |
| pH | — | 3.0–4.5 |
| Viscosity (25°C) | mPa·s | ≤50 (at 20 wt%) |
| Zeta potential | mV | +30 to +50 |
| Shelf stability | — | ≥6 months (no sedimentation) |
Application Suggestions
MLCC Internal Electrode Co-Firing
Nano zirconia serves as a restraining-layer material and sintering inhibitor in multilayer ceramic capacitor (MLCC) manufacturing. Added at 0.5–3 wt% to BaTiO₃ dielectric formulations, nano ZrO₂ pins grain boundaries during co-firing at 1150–1300°C, controlling grain size and preventing electrode discontinuity caused by differential sintering between dielectric and Ni electrode layers. The sub-80 nm particle size ensures uniform distribution in tape-casting slurries without creating defect sites. SEMITECH's low-Na₂O, low-Cl⁻ specifications meet the purity requirements of Class II MLCC producers.
CMP Slurry for Semiconductor Wafer Polishing
Zirconia-based CMP (chemical-mechanical planarization) slurries offer higher material removal rates than colloidal silica for polishing hard dielectric layers (SiC, GaN, sapphire) in power semiconductor and LED fabrication. SEMITECH's aqueous nano zirconia dispersion (d50 40–60 nm, pH 3.0–4.5, zeta potential >+30 mV) provides the colloidal stability and narrow particle-size distribution required to achieve scratch-free surface finishes with Ra <0.3 nm. The monoclinic crystal phase is preferred for CMP applications — its higher hardness (Mohs 6.5–7) versus tetragonal phase delivers faster material removal on hard substrates.
Solid-State Battery Electrolyte Layers
Nano zirconia is used as a precursor and sintering aid for garnet-type solid-state electrolytes (Li₇La₃Zr₂O₁₂, LLZO) in next-generation lithium batteries. The sub-50 nm particle size enables formation of dense LLZO films at reduced sintering temperatures (1050–1150°C vs. 1230°C for micron-scale powders), preserving lithium stoichiometry during thermal processing. SEMITECH supplies a tetragonal-phase nano ZrO₂ variant optimized for LLZO synthesis with controlled La and Li co-doping support from partner producers.
Catalyst Support and Promoter
High-surface-area nano zirconia (BET 25–40 m²/g) serves as a catalyst support for methanol synthesis, water-gas shift, and Fischer-Tropsch reactions, and as a structural promoter in automotive three-way catalysts (TWC). The tetragonal phase provides oxygen storage capacity through reversible Ce-Zr solid solution formation, enhancing TWC light-off performance. SEMITECH's nano zirconia is available in both pure and Ce-doped (5–20 mol% CeO₂) variants for catalyst applications.
Technical Support & FAQ: Nano Zirconia Powder
+Q1: What crystal phase should I specify — monoclinic or tetragonal?
Monoclinic nano ZrO₂ is the thermodynamically stable phase below 1170°C and offers higher hardness — preferred for CMP, abrasive, and refractory applications. Tetragonal nano ZrO₂ is metastable at room temperature in sub-30 nm particles (critical size effect) and offers oxygen storage capacity and better sinterability — preferred for catalyst supports, SOFC, and LLZO precursor applications. SEMITECH stocks both phases; specify your application for phase recommendation.
+Q2: Can the dispersion be reformulated into organic solvents?
Yes. SEMITECH's aqueous dispersion can be surface-modified with silane coupling agents (e.g., KH-550, KH-570) or carboxylic acid ligands to enable transfer into ethanol, toluene, MEK, or NMP solvent systems. This is critical for MLCC tape-casting slurries based on PVB/toluene-ethanol binder systems. SEMITECH can supply pre-functionalized dispersions at MOQ 50 kg on 4–6 week lead time.
+Q3: What purity level is needed for electronic-grade applications?
For MLCC and semiconductor CMP, total metallic impurities (excluding Hf) should be below 500 ppm, with Na₂O <200 ppm and Fe₂O₃ <50 ppm to prevent dielectric loss degradation and wafer contamination. SEMITECH's standard nano zirconia meets these thresholds. An ultra-high-purity grade (total impurities <100 ppm) is available at MOQ 25 kg for advanced node semiconductor applications.
+Q4: What are pricing, MOQ, and lead times?
Dry powder: MOQ 5 kg, stock lead time 7–14 business days. Aqueous dispersion: MOQ 25 kg, lead time 10–21 days (prepared to order). Pricing varies by particle size, crystal phase, and purity tier — contact info@semitechnm.com for quotation. Free 200 g evaluation samples available with full CoA (ICP-OES, XRD, DLS, BET).
Packing & Storage Information
Dry Powder 1 kg aluminum foil vacuum-sealed bags (lab/sample), 5 kg double-sealed PE bags, or 25 kg fiber drums with PE liner. Packed under dry nitrogen atmosphere to prevent moisture uptake.
Aqueous Dispersion 5 kg, 25 kg, and 200 kg HDPE containers with sealed caps. Ship upright; do not freeze.
Storage Conditions Dry powder: store at <30°C, <50% RH, in original sealed packaging. Shelf life 12 months. Aqueous dispersion: store at 5–35°C, avoid freezing. Shelf life 6 months from manufacture date. Agitate gently before use if stored for extended periods.